| DOI | Trouver le DOI : https://doi.org/10.1016/j.micron.2017.02.002 |
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| Auteur | Rechercher : Hettler, Simon; Rechercher : Dries, Manuel; Rechercher : Hermann, Peter; Rechercher : Obermair, Martin; Rechercher : Gerthsen, Dagmar; Rechercher : Malac, Marek1 |
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| Affiliation | - Conseil national de recherches Canada. Institut national de nanotechnologie
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| Format | Texte, Article |
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| Sujet | scanning transmission electron microscopy; contamination; electron-beam induced charging; phase plate; graphitized carbon; thin film |
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| Résumé | We analyze electron-beam induced carbon contamination in a transmission electron microscope. The study is performed on thin films potentially suitable as phase plates for phase-contrast transmission electron microscopy. Electron energy-loss spectroscopy and phase-plate imaging is utilized to analyze the contamination. The deposited contamination layer is identified as a graphitic carbon layer which is not prone to electrostatic charging whereas a non-conductive underlying substrate charges. Several methods that inhibit contamination are evaluated and the impact of carbon contamination on phase-plate imaging is discussed. The findings are in general interesting for scanning transmission electron microscopy applications. |
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| Date de publication | 2017-02-11 |
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| Maison d’édition | Elsevier |
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| Dans | |
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| Langue | anglais |
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| Publications évaluées par des pairs | Oui |
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| Numéro NPARC | 23002391 |
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| Exporter la notice | Exporter en format RIS |
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| Signaler une correction | Signaler une correction (s'ouvre dans un nouvel onglet) |
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| Identificateur de l’enregistrement | fabed280-81e3-4aa5-a0c5-04ea72b8d784 |
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| Enregistrement créé | 2017-10-26 |
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| Enregistrement modifié | 2020-03-16 |
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