| DOI | Resolve DOI: https://doi.org/10.1016/j.micron.2017.02.002 |
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| Author | Search for: Hettler, Simon; Search for: Dries, Manuel; Search for: Hermann, Peter; Search for: Obermair, Martin; Search for: Gerthsen, Dagmar; Search for: Malac, Marek1 |
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| Affiliation | - National Research Council of Canada. National Institute for Nanotechnology
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| Format | Text, Article |
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| Subject | scanning transmission electron microscopy; contamination; electron-beam induced charging; phase plate; graphitized carbon; thin film |
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| Abstract | We analyze electron-beam induced carbon contamination in a transmission electron microscope. The study is performed on thin films potentially suitable as phase plates for phase-contrast transmission electron microscopy. Electron energy-loss spectroscopy and phase-plate imaging is utilized to analyze the contamination. The deposited contamination layer is identified as a graphitic carbon layer which is not prone to electrostatic charging whereas a non-conductive underlying substrate charges. Several methods that inhibit contamination are evaluated and the impact of carbon contamination on phase-plate imaging is discussed. The findings are in general interesting for scanning transmission electron microscopy applications. |
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| Publication date | 2017-02-11 |
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| Publisher | Elsevier |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| NPARC number | 23002391 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | fabed280-81e3-4aa5-a0c5-04ea72b8d784 |
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| Record created | 2017-10-26 |
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| Record modified | 2020-03-16 |
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