Conseil national de recherches du Canada. Dispositifs médicaux
SPIE Microtechnologies, May 8-10, 2017, Barcelona, Spain
The large transparency window of silicon (1.1 - 8 μm wavelength range) makes it a promising material for the implementation of on-chip sensors operating over an ultra-wide wavelength range. However, the implementation of the silicon-on-insulator platform is restricted by the absorption of buried oxide layer for wavelengths above 4 μm. Here, we report our advances in development of silicon waveguides for broadband operation extending from near- to mid-infrared wavelengths. We present suspended silicon waveguides that exploit a novel periodic corrugation approach to circumvent the buried oxide absorption problem and provide effective single mode operation simultaneously for near- and mid-infrared wavelengths.
Date de publication
Society of Photo-Optical Instrumentation Engineers (SPIE)
Integrated Photonics: Materials, Devices, and Applications IV (16 juin 2017) : 102490A–.