| DOI | Trouver le DOI : https://doi.org/10.1088/0957-0233/22/2/027001 |
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| Auteur | Rechercher : Decker, Jennifer E.1; Rechercher : Eves, B. J.1; Rechercher : Pekelsky, J. R.1; Rechercher : Douglas, R. J.1 |
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| Affiliation | - Conseil national de recherches du Canada. Institut des étalons nationaux de mesure du CNRC
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| Format | Texte, Article |
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| Sujet | grating; pitch; nanoscale; metrology; nanometrology; diffractometer; diffraction; calibration; Monte Carlo; refractive index of air; atomic force microscope; scanning probe microscope; scanning electron microscope |
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| Résumé | Measurement of grating pitch by optical diffraction is one of the few methods currently available for establishing traceability to the definition of the meter on the nanoscale; therefore, understanding all aspects of the measurement is imperative for accurate dissemination of the SI meter. A method for evaluating the component of measurement uncertainty associated with coherent scattering in the diffractometer instrument is presented. The model equation for grating pitch calibration by optical diffraction is an example where Monte Carlo (MC) methods can vastly simplify evaluation of measurement uncertainty. This paper includes discussion of the practical aspects of implementing MC methods for evaluation of measurement uncertainty in grating pitch calibration by diffraction. Downloadable open-source software is demonstrated. |
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| Date de publication | 2010-12-21 |
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| Dans | |
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| Langue | anglais |
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| Publications évaluées par des pairs | Oui |
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| Numéro NPARC | 21268135 |
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| Exporter la notice | Exporter en format RIS |
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| Signaler une correction | Signaler une correction (s'ouvre dans un nouvel onglet) |
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| Identificateur de l’enregistrement | 1bf37c29-ef8c-49b4-9873-c89e391b150d |
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| Enregistrement créé | 2013-05-08 |
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| Enregistrement modifié | 2020-04-17 |
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