| DOI | Resolve DOI: https://doi.org/10.1088/0957-0233/22/2/027001 |
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| Author | Search for: Decker, Jennifer E.1; Search for: Eves, B. J.1; Search for: Pekelsky, J. R.1; Search for: Douglas, R. J.1 |
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| Affiliation | - National Research Council of Canada. NRC Institute for National Measurement Standards
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| Format | Text, Article |
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| Subject | grating; pitch; nanoscale; metrology; nanometrology; diffractometer; diffraction; calibration; Monte Carlo; refractive index of air; atomic force microscope; scanning probe microscope; scanning electron microscope |
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| Abstract | Measurement of grating pitch by optical diffraction is one of the few methods currently available for establishing traceability to the definition of the meter on the nanoscale; therefore, understanding all aspects of the measurement is imperative for accurate dissemination of the SI meter. A method for evaluating the component of measurement uncertainty associated with coherent scattering in the diffractometer instrument is presented. The model equation for grating pitch calibration by optical diffraction is an example where Monte Carlo (MC) methods can vastly simplify evaluation of measurement uncertainty. This paper includes discussion of the practical aspects of implementing MC methods for evaluation of measurement uncertainty in grating pitch calibration by diffraction. Downloadable open-source software is demonstrated. |
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| Publication date | 2010-12-21 |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| NPARC number | 21268135 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | 1bf37c29-ef8c-49b4-9873-c89e391b150d |
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| Record created | 2013-05-08 |
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| Record modified | 2020-04-17 |
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