| Author | Search for: Burnett, J. H.; Search for: Amirtharaj, P. M.; Search for: Cheong, H. M.; Search for: Paul, W.; Search for: Koteles, E. S.1; Search for: Elman, B. |
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| Affiliation | - National Research Council of Canada. NRC Institute for Microstructural Sciences
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| Format | Text, Article |
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| Conference | International Workshop on Semiconductor Characterization: Present Status and Future Needs, January 30 - February 2, 1995, Gaithersburg, MD, USA |
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| Publication date | 1996 |
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| In | |
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| Language | English |
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| NPARC number | 12338602 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | ebd36747-09ad-4a3c-bb5a-ac0319a55d37 |
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| Record created | 2009-09-10 |
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| Record modified | 2020-03-20 |
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