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Experimental study of drilling sub-10 μm holes in thin metal foils with femtosecond laser pulses

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1016/S0169-4332(99)00331-1
AuthorSearch for: 1; Search for: 2; Search for: 2; Search for: 3; Search for: 2
Affiliation
  1. National Research Council of Canada. NRC Institute for National Measurement Standards
  2. National Research Council of Canada. Security and Disruptive Technologies
  3. National Research Council of Canada. Automotive and Surface Transportation
FormatText, Article
Subjectdrilling; laser ablation; mathematical models; micromachining; pulsed laser applications; solid state lasers; ultrafast phenomena; laser parameters; metal foil
Abstract
Aluminum foils with thickness ranging from 1.5 to 50 μm, and W, Mo, Ti, Cu, Fe, Ag, Au, and Pb foils of 25 μm thickness have been drilled with femtosecond Ti:sapphire laser pulses centered at 800 nm. The influence of laser parameters and material properties on hole drilling processes at sub-10 μm scale has been examined. A simple model is shown to predict the ablation rate for a range of metals.
Publication date
In
  • Applied Surface Science 152, no. 3 (2 November 1999): 138–148.
LanguageEnglish
Peer reviewedYes
NPARC number21276188
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Record identifierd909edcd-4fbc-406d-99a6-fdb0a347e3d1
Record created2015-09-28
Record modified2020-03-20
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