| DOI | Resolve DOI: https://doi.org/10.1002/1521-3862(20020116)8:1<17::AID-CVDE17>3.0.CO;2-3 |
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| Author | Search for: Chen, Yao-Lun; Search for: Liu, Chao-Shiuan; Search for: Chi, Yun; Search for: Carty, Arthur J.1; Search for: Peng, Shie-Ming; Search for: Lee, Gene-Hsiang |
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| Affiliation | - National Research Council of Canada. NRC Steacie Institute for Molecular Sciences
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| Format | Text, Article |
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| Subject | 1,5-Cyclooctadiene; Aminoalkoxide; Hexafluorodiacetone; Imine; Iridium; Ketoiminate; Nobel metals |
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| Abstract | The syntheses of three volatile IrI cyclooctadiene precursors is described. The anionic ligand was carefully selected to produce a structure (see Figure) with physical properties suitable for CVD requirements. Films grown using oxygen as carrier gas produced iridium thin films with a purity higher than 98 % and a measured resistivity in the range of 8.4 to 10.2 μΩ cm. |
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| Publication date | 2002-01-01 |
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| In | |
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| Language | English |
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| NPARC number | 12329219 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | c738aca7-bdf4-453d-981c-fb7c9965bef6 |
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| Record created | 2009-09-10 |
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| Record modified | 2020-03-30 |
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