Deep learning-based prediction of fabrication-process-induced structural variations in nanophotonic devices

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DOIResolve DOI: https://doi.org/10.1021/acsphotonics.1c01973
AuthorSearch for: ORCID identifier: https://orcid.org/0000-0001-9323-4452; Search for: 1; Search for: ; Search for: 2
Name affiliation
  1. National Research Council of Canada. Advanced Electronics and Photonics
  2. National Research Council of Canada. Digital Technologies
FunderSearch for: National Research Council Canada
FormatText, Article
Subjectsilicon photonics; integrated photonics; machine learning; deep convolutional neural networks; fabrication process variations; topological optimization
Abstract
Publication date
PublisherAmerican Chemical Society (ACS)
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In
LanguageEnglish
Peer reviewedYes
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Record identifierbec52cb3-e5ca-4587-adb8-c3721a324915
Record created2022-07-28
Record modified2022-10-19
Date modified: