Deep learning-based prediction of fabrication-process-induced structural variations in nanophotonic devices

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Name affiliation
  1. National Research Council of Canada. Advanced Electronics and Photonics
  2. National Research Council of Canada. Digital Technologies
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FormatText, Article
Subjectsilicon photonics; integrated photonics; machine learning; deep convolutional neural networks; fabrication process variations; topological optimization
Publication date
PublisherAmerican Chemical Society (ACS)
Peer reviewedYes
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Record identifierbec52cb3-e5ca-4587-adb8-c3721a324915
Record created2022-07-28
Record modified2023-03-16
Date modified: