| Download | - View final version: Calibration of an internal-length standard by angle-stepping gap interferometry (PDF, 2.7 MiB)
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| DOI | Resolve DOI: https://doi.org/10.1088/1681-7575/adb753 |
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| Author | Search for: Leroux, Ian D.1; Search for: Hunter, Tyler J.1; Search for: Reain, Gregory C.1; Search for: Eves, Brian J.1ORCID identifier: https://orcid.org/0000-0003-2481-0334 |
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| Affiliation | - National Research Council Canada. Metrology Research Centre
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| Format | Text, Article |
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| Subject | Fabry-Pérot etalon; phase-stepping interferometry; bidirectional correction; probe diameter; point-to-point length |
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| Abstract | We demonstrate a simple interferometric method for calibrating the length of an uncoated Fabry-Pérot etalon, using a rotary analog of phase-stepping interferometry. The interferometric method is designed to realize nearly the same measurand as a subsequent measurement in a tactile instrument. The estimated expanded uncertainty of 4 nm for the optical calibration, together with the well-matched measurands, make the etalon a promising transfer standard for the calibration of bidirectional corrections in tactile probing systems. |
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| Publication date | 2025-03-04 |
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| Publisher | IOP Publishing |
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| Copyright statement | - © His Majesty the King in Right of Canada, as represented by the Minister of Innovation, Science and Industry, 2025
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| Licence | |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | 7f23ac7e-c3cd-44f4-b5e6-01d0fd3facd7 |
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| Record created | 2026-03-19 |
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| Record modified | 2026-04-21 |
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