| DOI | Resolve DOI: http://doi.org/10.1117/12.309498 |
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| Author | Search for: Corkum, P. B.1 |
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| Name affiliation | - National Research Council Canada
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| Type | Article |
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| Proceedings title | SPIE - International Society for Optical Engineering. Proceedings |
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| Conference | Laser Applications in Microelectronic and Optoelectronic Manufacturing V, 26 January 1998 through 28 January 1998, San Jose, CA |
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| ISSN | 0277-786X |
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| Volume | 3274 |
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| Pages | 10–17; # of pages: 8 |
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| Subject | Laser pulses; Light refraction; Micromachining; Semiconductor materials; Femtosecond lasers; Materials processing; Lasers |
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| Abstract | As a result of rapid engineering progress, femtosecond lasers will soon be available for industrial applications such as micro machining. I will review the physics behind laser machining of metals, semiconductors and transparent materials. Then I will briefly discuss the current state-of-the-art in femtosecond laser technology of interest to micro machining. |
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| Publication date | 1998 |
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| Language | English |
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| Peer reviewed | Yes |
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| NPARC number | 21276185 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction |
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Record identifier | 74a61c28-296c-4be1-8dbb-910f050b4e1e | | Record created | 2015-09-28 |
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| Record modified | 2017-04-24 |
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