| DOI | Resolve DOI: https://doi.org/10.1117/12.309498 |
|---|
| Author | Search for: Corkum, P. B.1 |
|---|
| Name affiliation | - National Research Council of Canada
|
|---|
| Format | Text, Article |
|---|
| Conference | Laser Applications in Microelectronic and Optoelectronic Manufacturing V, January 26-28, 1998, San Jose, CA, USA |
|---|
| Subject | Laser pulses; Light refraction; Micromachining; Semiconductor materials; Femtosecond lasers; Materials processing; Lasers |
|---|
| Abstract | As a result of rapid engineering progress, femtosecond lasers will soon be available for industrial applications such as micro machining. I will review the physics behind laser machining of metals, semiconductors and transparent materials. Then I will briefly discuss the current state-of-the-art in femtosecond laser technology of interest to micro machining. |
|---|
| Publication date | 1998 |
|---|
| Publisher | SPIE |
|---|
| In | |
|---|
| Series | |
|---|
| Language | English |
|---|
| Peer reviewed | Yes |
|---|
| NPARC number | 21276185 |
|---|
| Export citation | Export as RIS |
|---|
| Report a correction | Report a correction (opens in a new tab) |
|---|
| Record identifier | 74a61c28-296c-4be1-8dbb-910f050b4e1e |
|---|
| Record created | 2015-09-28 |
|---|
| Record modified | 2020-03-20 |
|---|
