DOI | Resolve DOI: https://doi.org/10.1117/12.309498 |
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Author | Search for: Corkum, P. B.1 |
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Affiliation | - National Research Council of Canada
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Format | Text, Article |
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Conference | Laser Applications in Microelectronic and Optoelectronic Manufacturing V, January 26-28, 1998, San Jose, CA, USA |
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Subject | Laser pulses; Light refraction; Micromachining; Semiconductor materials; Femtosecond lasers; Materials processing; Lasers |
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Abstract | As a result of rapid engineering progress, femtosecond lasers will soon be available for industrial applications such as micro machining. I will review the physics behind laser machining of metals, semiconductors and transparent materials. Then I will briefly discuss the current state-of-the-art in femtosecond laser technology of interest to micro machining. |
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Publication date | 1998 |
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Publisher | SPIE |
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In | |
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Series | |
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Language | English |
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Peer reviewed | Yes |
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NPARC number | 21276185 |
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Export citation | Export as RIS |
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Report a correction | Report a correction (opens in a new tab) |
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Record identifier | 74a61c28-296c-4be1-8dbb-910f050b4e1e |
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Record created | 2015-09-28 |
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Record modified | 2020-03-20 |
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