Femtosecond lasers and their implications for materials processing

From National Research Council Canada

DOIResolve DOI: http://doi.org/10.1117/12.309498
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  1. National Research Council Canada
TypeArticle
Proceedings titleSPIE - International Society for Optical Engineering. Proceedings
ConferenceLaser Applications in Microelectronic and Optoelectronic Manufacturing V, 26 January 1998 through 28 January 1998, San Jose, CA
ISSN0277-786X
Volume3274
Pages1017; # of pages: 8
SubjectLaser pulses; Light refraction; Micromachining; Semiconductor materials; Femtosecond lasers; Materials processing; Lasers
Abstract
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LanguageEnglish
Peer reviewedYes
NPARC number21276185
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