Femtosecond lasers and their implications for materials processing
Femtosecond lasers and their implications for materials processing
DOI | Resolve DOI: https://doi.org/10.1117/12.309498 |
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Author | Search for: Corkum, P. B.1 |
Name affiliation |
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Format | Text, Article |
Proceedings title | Laser Applications in Microelectronic and Optoelectronic Manufacturing V |
Series title | Proceedings of SPIE; no. 3274 |
Conference | Laser Applications in Microelectronic and Optoelectronic Manufacturing V, January 26-28, 1998, San Jose, CA, USA |
ISSN | 0277-786X 1996-756X |
Pages | 10–17 |
Subject | Laser pulses; Light refraction; Micromachining; Semiconductor materials; Femtosecond lasers; Materials processing; Lasers |
Abstract | |
Publication date | 1998 |
Publisher | SPIE |
Language | English |
Peer reviewed | Yes |
NPARC number | 21276185 |
Export citation | Export as RIS |
Report a correction | Report a correction | Record identifier | 74a61c28-296c-4be1-8dbb-910f050b4e1e |
Record created | 2015-09-28 |
Record modified | 2020-03-20 |