Femtosecond lasers and their implications for materials processing

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1117/12.309498
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  1. National Research Council Canada
FormatText
TypeArticle
Proceedings titleLaser Applications in Microelectronic and Optoelectronic Manufacturing V
Series titleProceedings of SPIE; no. 3274
ConferenceLaser Applications in Microelectronic and Optoelectronic Manufacturing V, January 26-28, 1998, San Jose, CA, USA
ISSN0277-786X
1996-756X
Pages1017
SubjectLaser pulses; Light refraction; Micromachining; Semiconductor materials; Femtosecond lasers; Materials processing; Lasers
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PublisherSPIE
LanguageEnglish
Peer reviewedYes
NPARC number21276185
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