Femtosecond lasers and their implications for materials processing

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1117/12.309498
AuthorSearch for: 1
Name affiliation
  1. National Research Council of Canada
FormatText, Article
Proceedings titleLaser Applications in Microelectronic and Optoelectronic Manufacturing V
Series titleProceedings of SPIE; no. 3274
ConferenceLaser Applications in Microelectronic and Optoelectronic Manufacturing V, January 26-28, 1998, San Jose, CA, USA
ISSN0277-786X
1996-756X
Pages10–17
SubjectLaser pulses; Light refraction; Micromachining; Semiconductor materials; Femtosecond lasers; Materials processing; Lasers
Abstract
As a result of rapid engineering progress, femtosecond lasers will soon be available for industrial applications such as micro machining. I will review the physics behind laser machining of metals, semiconductors and transparent materials. Then I will briefly discuss the current state-of-the-art in femtosecond laser technology of interest to micro machining.
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PublisherSPIE
LanguageEnglish
Peer reviewedYes
NPARC number21276185
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