| DOI | Resolve DOI: https://doi.org/10.1016/j.ultramic.2018.02.003 |
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| Author | Search for: Hayashida, Misa1; Search for: Cui, Kai1; Search for: Malac, Marek1; Search for: Egerton, Ray |
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| Affiliation | - National Research Council of Canada. Nanotechnology
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| Format | Text, Article |
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| Abstract | We measured the linear thermal expansion coefficients of amorphous 5–30 nm thick SiN and 17 nm thick Formvar/Carbon (F/C) films using electron diffraction in a transmission electron microscope. Positive thermal expansion coefficient (TEC) was observed in SiN but negative coefficients in the F/C films. In case of amorphous carbon (aC) films, we could not measure TEC because the diffraction radii required several hours to stabilize at a fixed temperature. |
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| Publication date | 2018-02-16 |
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| Publisher | Elsevier |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| NPARC number | 23002830 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | 6d816a79-9d25-4897-8f88-71d8cb436176 |
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| Record created | 2018-03-08 |
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| Record modified | 2020-03-16 |
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