Quantitative measurement of Field Emission Scanning Electron Microscope FESEM spatial resolution

Alternative title	Symposium 7
Author	Search for: Drouin, D.; Search for: Aimez, V.; Search for: Fraser, Jeffrey¹; Search for: Poole, Philip¹; Search for: Beauvais, J.; Search for: Beerens, J.
Affiliation	National Research Council Canada. NRC Institute for Microstructural Sciences
Format	Text, Article
Conference	2nd Conf Int Union Microbeam Analysis Societies, 9-13 July 2000, Kailua-Kona, Hawaii
NPARC number	12346382
Export citation	Export as RIS
Report a correction	Report a correction (opens in a new tab)
Record identifier	6b8e66d6-4703-446c-b875-0d1dbbc6d0d8
Record created	2009-09-17
Record modified	2020-04-16