DOI | Resolve DOI: https://doi.org/10.1016/j.ultramic.2017.09.009 |
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Author | Search for: Hettler, Simon; Search for: Kano, Emi1; Search for: Dries, Manuel; Search for: Gerthsen, Dagmar; Search for: Pfaffmann, Lukas; Search for: Bruns, Michael; Search for: Beleggia, Marco; Search for: Malac, Marek |
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Affiliation | - National Research Council of Canada. Nanotechnology
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Format | Text, Article |
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Subject | scanning transmission electron microscopy; transmission electron microscopy; electron-beam induced charging; thin film; phase plate; radiation damage; hole-free phase plate; volta phase plate |
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Abstract | A systematic study on charging of carbon thin films under intense electron-beam irradiation was performed in a transmission electron microscope to identify the underlying physics for the functionality of hole-free phase plates. Thin amorphous carbon films fabricated by different deposition techniques and single-layer graphene were studied. Clean thin films at moderate temperatures show small negative charging while thin films kept at an elevated temperature are stable and not prone to beam-generated charging. The charging is attributed to electron-stimulated desorption (ESD) of chemisorbed water molecules from the thin-film surfaces and an accompanying change of work function. The ESD interpretation is supported by experimental results obtained by electron-energy loss spectroscopy, hole-free phase plate imaging, secondary electron detection and x-ray photoelectron spectroscopy as well as simulations of the electrostatic potential distribution. The described ESD-based model explains previous experimental findings and is of general interest to any phase-related technique in a transmission electron microscope. |
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Publication date | 2017-09-28 |
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Publisher | Elsevier |
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In | |
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Language | English |
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Peer reviewed | Yes |
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NPARC number | 23002641 |
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Export citation | Export as RIS |
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Report a correction | Report a correction (opens in a new tab) |
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Record identifier | 60bf43bb-8525-4626-98a4-d8506d30fe51 |
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Record created | 2017-12-08 |
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Record modified | 2020-03-16 |
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