Comparison of processes in radio-and microwave frequency plasmas by optical emission spectroscopy

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  1. National Research Council Canada
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TypeArticle
Proceedings title10th International Symposium on Plasma Chemistry, Bochum, Germany, August 4-9, 1991: symposium proceedings
Conference10th International Symposium on Plasma Chemistry, August 4-9, 1991, Bochum, Germany
Publication date
PublisherInternational Union of Pure and Applied Chemistry
LanguageEnglish
Peer reviewedYes
NPARC number21277527
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Record created2016-04-05
Record modified2016-05-09
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