Practical magnetron sputtering system for the deposition of optical multilayer coatings
Practical magnetron sputtering system for the deposition of optical multilayer coatings
| Link | http://ao.osa.org/abstract.cfm?id=40045 |
|---|---|
| Author | Search for: Dobrowolski, J. A.; Search for: Pekelsky, J. R.; Search for: Pelletier, R.; Search for: Ranger, M.; Search for: Sullivan, B. T.; Search for: Waldorf, A. J. |
| Format | Text, Article |
| Publication date | 1992 |
| In | |
| Language | English |
| NRC number | NRC-INMS-765 |
| NPARC number | 5765273 |
| Export citation | Export as RIS |
| Report a correction | Report a correction (opens in a new tab) |
| Record identifier | 1b999396-8c53-440f-8f69-62eec4a749ee |
| Record created | 2009-03-29 |
| Record modified | 2020-04-24 |
- Date modified: