Practical magnetron sputtering system for the deposition of optical multilayer coatings
Practical magnetron sputtering system for the deposition of optical multilayer coatings
| DOI | Resolve DOI: https://doi.org/10.1364/AO.31.003784 |
|---|---|
| Author | Search for: ; Search for: ; Search for: ; Search for: ; Search for: ; Search for: |
| Format | Text, Article |
| Publication date | 1992-07 |
| Publisher | Optica Publishing Group |
| In | |
| Language | English |
| Peer reviewed | Yes |
| NRC number | NRC-INMS-765 |
| NPARC number | 5765273 |
| Export citation | Export as RIS |
| Report a correction | Report a correction (opens in a new tab) |
| Record identifier | 1b999396-8c53-440f-8f69-62eec4a749ee |
| Record created | 2009-03-29 |
| Record modified | 2023-09-29 |
- Date modified: