Excimer laser thin metallic film patterning on polyvinyledene difluoride

DOI	Trouver le DOI : https://doi.org/10.1557/PROC-129-399
Auteur	Rechercher : Gauthier, Michel¹; Rechercher : Bourret, Richard¹; Rechercher : Jen, Cheng-Kuei¹; Rechercher : Adler, Eric L.
Affiliation	Conseil national de recherches Canada
Format	Texte, Article
Résumé	Tactile sensors and ultrasonic transducers based on the piezoelectric properties of polyvinyledene difluoride, PVF₂, usually take the form of thin 10 - 110 μm polymer films coated on one or both sides with a metallic film. Electrode patterns are usually fabricated by photolithography that requires a 90 °C baking process which may harm the piezoelectric properties of the PVF₂ film. We have developed an alternate method, based on direct patterning with a XeCl laser, yielding complex patterns of lines as narrow as 20 μm which are better than those fabricated by photolithography. The metallic film is ablated on both sides of the polymer while maintaining the intrinsic properties of the PVF₂. The ablation mechanism is investigated using transmission optical, scanning electron, and scanning acoustic microscope images. The performance of an ultrasonic transducer fabricated with this technique is described.
Date de publication	1988
Maison d’édition	Cambridge University Press Materials Research Society
Dans	MRS Proceedings 129, 399 (1988).
Langue	anglais
Publications évaluées par des pairs	Oui
Exporter la notice	Exporter en format RIS
Signaler une correction	Signaler une correction (s'ouvre dans un nouvel onglet)
Identificateur de l’enregistrement	c8d06851-8f8e-4ece-9d80-cb3f7f37d033
Enregistrement créé	2024-03-19
Enregistrement modifié	2024-03-19

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Date de modification :: 2026-05-12