Nanofabrication: Techniques and Principles

DOI	Trouver le DOI : https://doi.org/10.1007/978-3-7091-0424-8
Éditeur	Rechercher : Stepanova, Maria¹; Rechercher : Dew, Steven
Affiliation	Conseil national de recherches Canada. Institut national de nanotechnologie
Format	Texte, Livre
ISBN	3709104238 978-3-7091-0424-8 978-3-7091-0423-1
Résumé	Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.
Date de publication	2012
Maison d’édition	Springer International Publishing
Langue	anglais
Publications évaluées par des pairs	Oui
Numéro NPARC	21275848
Exporter la notice	Exporter en format RIS
Signaler une correction	Signaler une correction (s'ouvre dans un nouvel onglet)
Identificateur de l’enregistrement	b56ffebd-ced7-45a4-8560-2af29eb8a7b3
Enregistrement créé	2015-07-14
Enregistrement modifié	2020-09-01