Study of thin film inhomogeneity with a fast-scanning acousto-optic spectrophotometer

DOI	Trouver le DOI : https://doi.org/10.1117/12.246817
Auteur	Rechercher : Tikhonravov, Alexander; Rechercher : Trubetskov, Michael; Rechercher : Tikhonov, Andrew; Rechercher : Tcherednichenko, Oleg; Rechercher : Lysoi, Boris; Rechercher : Mikhailova, Ksenia; Rechercher : Sullivan, Brian; Rechercher : Dobrowolski, Jerzy; Rechercher : Reid, Ian
Format	Texte, Article
Résumé	A novel device, the fast-scanning acousto-optic spectrophotometer, was used to measure the in situ reflectance of a thin film during deposition. The reflectance data, which was measured at different film thicknesses and over a wavelength region from 400 to 1100 nm, was used to study the refractive index profile of inhomogeneous ZrO2 films. This data was subsequently analyzed using a homogeneous thin film model to derive an 'effective' refractive index profile.
Maison d’édition	SPIE
Emplacement	Glasgow, United Kingdom
Numéro NPARC	12338957
Exporter la notice	Exporter en format RIS
Signaler une correction	Signaler une correction (s'ouvre dans un nouvel onglet)
Identificateur de l’enregistrement	b269c19d-02d2-4765-9ab3-5fe4d9c50b07
Enregistrement créé	2009-09-11
Enregistrement modifié	2020-04-16