Increasing the range of unambiguity in step-height measurement using multiple-wavelength interferometry — application to absolute long gauge block measurement

DOI	Trouver le DOI : https://doi.org/10.1364/AO.42.005670
Auteur	Rechercher : Decker, Jennifer E.¹; Rechercher : Miles, John R.; Rechercher : Madej, Alan A.¹; Rechercher : Siemsen, Ralph F.¹; Rechercher : Siemsen, Klaus J.¹; Rechercher : de Bonth, Sebastian; Rechercher : Bustraan, Krijn; Rechercher : Temple, Sara¹; Rechercher : Pekelsky, James R¹
Affiliation	Conseil national de recherches Canada. Institut des étalons nationaux de mesure du CNRC
Format	Texte, Article
Résumé	An instrument for step-height measurement by multiple-wavelength interferometry is described. The addition of a 1152-nm wavelength to a multiple-wavelength scheme applying wavelengths of 633, 612, and 543 nm relaxes the tolerance range of the required preliminary measurement to ±140 μm, if the total uncertainty in the fringe fraction measurement can be kept below 2%. For larger fringe fraction measurement uncertainty, numerical simulations show that the integer number of interference orders can still be determined unambiguously if the range in the preliminary knowledge of the length has been correspondingly reduced. The interferometer instrument is described, and experimental data are presented in the context of long gauge block calibration at the National Research Council of Canada.
Date de publication	2003
Dans	Applied optics 42, nº October 28 (2003) : 5670–5678.
Langue	anglais
Numéro du CNRC	NRC-INMS-233
Numéro NPARC	8899861
Exporter la notice	Exporter en format RIS
Signaler une correction	Signaler une correction (s'ouvre dans un nouvel onglet)
Identificateur de l’enregistrement	a94a8255-b44b-4dce-810d-a9f6dde7b8fd
Enregistrement créé	2009-04-22
Enregistrement modifié	2020-04-02

Détails de la page

Par :

Conseil national de recherches Canada

Date de modification :: 2026-06-11