| Téléchargement | - Voir la version finale : Spatially controlled nano-structuring of silicon with femtosecond vortex pulses (PDF, 3.8 Mio)
- Voir les données supplémentaires : Spatially controlled nano-structuring of silicon with femtosecond vortex pulses (PDF, 543 Kio)
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| DOI | Trouver le DOI : https://doi.org/10.1038/s41598-020-69390-4 |
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| Auteur | Rechercher : Rahimian, M. G.; Rechercher : Jain, A.; Rechercher : Larocque, H.; Rechercher : Corkum, P. B.; Rechercher : Karimi, E.; Rechercher : Bhardwaj, V. R. |
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| Format | Texte, Article |
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| Sujet | laser material processing; optics and photonics |
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| Résumé | Engineering material properties is key for development of smart materials and next generation nanodevices. This requires nanoscale spatial precision and control to fabricate structures/defects. Lithographic techniques are widely used for nanostructuring in which a geometric pattern on a mask is transferred to a resist by photons or charged particles and subsequently engraved on the substrate. However, direct mask-less fabrication has only been possible with electron and ion beams. That is because light has an inherent disadvantage; the diffraction limit makes it difficult to interact with matter on dimensions smaller than the wavelength of light. Here we demonstrate spatially controlled formation of nanocones on a silicon surface with a positional precision of 50 nm using femtosecond laser ablation comprising a superposition of optical vector vortex and Gaussian beams. Such control and precision opens new opportunities for nano-printing of materials using techniques such as laser-induced forward transfer and in general broadens the scope of laser processing of materials. |
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| Date de publication | 2020-07-28 |
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| Maison d’édition | Nature Research |
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| Licence | |
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| Dans | |
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| Langue | anglais |
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| Publications évaluées par des pairs | Oui |
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| Publication du CNRC | Cette publication n’est pas du CNRCCe sont des publications qui ont été rédigées par un auteur du CNRC, mais avant que celui-ci soit employé du CNRC. |
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| Exporter la notice | Exporter en format RIS |
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| Signaler une correction | Signaler une correction (s'ouvre dans un nouvel onglet) |
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| Identificateur de l’enregistrement | 571b4bd1-dd9b-45a4-b344-aa5e0a58dc43 |
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| Enregistrement créé | 2020-12-24 |
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| Enregistrement modifié | 2020-12-24 |
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