Synthesis and characterization of silicon nitride powders produced in a d.c. thermal plasma reactor

DOI	Trouver le DOI : https://doi.org/10.1007/BF02402668
Auteur	Rechercher : Allaire, F.; Rechercher : Dallaire, S.¹
Affiliation	Conseil national de recherches Canada
Format	Texte, Article
Sujet	nitride; production rate; infrared spectrum; internal pressure; NH₄Cl
Résumé	Ultra-fine silicon nitride powder was synthesized from the SiCl₄-NH₃-H₂-Ar system using a d.c. plasma torch reactor (production rate 150–400 g h⁻¹). The powder produced is pure white, fluffy and amorphous. The particles are spheroidal in shape with a mean diameter between 30–60 nm forming aggregates of 0.1–0.4 μm depending on the operational conditions. Chemical analysis on the crude powder handled at ambient atmosphere revealed: N(−NH₄Cl):37–39%, O:3–5% and Cl:2–3%. The amorphous powder can be crystallized around 1500 °C under nitrogen to give an α-phase content in excess of 90%. Infrared spectra can be used to semi-quantitatively determine the NH₄Cl content of the crude powder. That proportion is between 2.5 and 4%. The influence of some process parameters e.g. (N/Si and H₂/N molar ratios, internal pressure) on powder properties was also investigated. The N/Si molar ratio was found to be the most important parameter for the powder composition whereas the internal pressure plays a major role on the powder morphology.
Date de publication	1991-12-01
Maison d’édition	Springer
Dans	Journal of Materials Science 26, nº 24 : 6736–6740.
Langue	anglais
Publications évaluées par des pairs	Oui
Numéro du CNRC	CNRC 31684 NRC-IGM90AP-21008-1007-G
Exporter la notice	Exporter en format RIS
Signaler une correction	Signaler une correction (s'ouvre dans un nouvel onglet)
Identificateur de l’enregistrement	090ab10a-52d4-477a-acd4-25320aa7e5dc
Enregistrement créé	2020-08-05
Enregistrement modifié	2020-08-05

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Date de modification :: 2026-09-10