| DOI | Trouver le DOI : https://doi.org/10.1117/12.470609 |
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| Auteur | Rechercher : Wrobel, Jerzy M.; Rechercher : Placzek-Popko, Ewa; Rechercher : Dubowski, Jan J.1; Rechercher : Tang, Haipeng1; Rechercher : Webb, James B.1 |
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| Affiliation | - Conseil national de recherches du Canada
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| Format | Texte, Article |
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| Conférence | High-Power Lasers and Applications, 2002, San Jose, California, United States |
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| Résumé | Photoluminescence analysis has been implemented to investigate the crystalline properties of Gallium Nitride layers ablated with an XeCl excimer laser. The measurements were carried out on craters up to 1 micrometers deep, which corresponded to almost half the thickness of the deposited film. The craters were etched in an air environment with laser fluences in the range of 99-231 mJ/cm2. In the 350-1200 nm spectral range, the near-band-edge emission, and the donor-acceptor pair recombination were identified. All spectra were dominated by the excitonic recombination. The analysis revealed that during the ablation, the full width at half maximum of the donor-bound luminescence line remained almost independent of both the depth of the crater and of the laser fluence. Also, the donor-acceptor pari recombination, which manifests its presence through a weak yellow luminescence observed in the vicinity of the 600 nm wavelength, has been consistently observed in the spectra. A relative decrease in the excitonic emission indicated that a thin layer of altered material with lower crystalline quality was formed at the surface of the ablated material |
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| Date de publication | 2002-06-18 |
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| Maison d’édition | SPIE |
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| Dans | |
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| Série | |
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| Langue | anglais |
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| Publications évaluées par des pairs | Oui |
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| Numéro NPARC | 12339301 |
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| Exporter la notice | Exporter en format RIS |
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| Signaler une correction | Signaler une correction (s'ouvre dans un nouvel onglet) |
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| Identificateur de l’enregistrement | 04abc3db-7c05-4cde-af2a-9662103ce645 |
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| Enregistrement créé | 2009-09-11 |
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| Enregistrement modifié | 2020-04-06 |
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