| Download | - View accepted manuscript: High-temperature gas sensor using perovskite thin films on a suspended microheater (PDF, 556 KiB)
|
|---|
| DOI | Resolve DOI: https://doi.org/10.1116/1.1463072 |
|---|
| Author | Search for: Grudin, O.; Search for: Marinescu, R.; Search for: Landsberger, L. M.; Search for: Kahrizi, M; Search for: Frolov, G.; Search for: Cheeke, D. J. N.; Search for: Chehab, S.1; Search for: Post, Michael1; Search for: Tunney, Jim1; Search for: Du, Xiaomei1; Search for: Yang, Dongfang2; Search for: Segall, D. |
|---|
| Affiliation | - National Research Council of Canada. NRC Institute for Chemical Process and Environmental Technology
- National Research Council of Canada. NRC Industrial Materials Institute
|
|---|
| Format | Text, Article |
|---|
| Subject | gas sensors; high-temperature techniques; CMOS integrated circuits; electric resistance; arrays; strontium compounds; pulsed laser deposition |
|---|
| Publication date | 2002-05 |
|---|
| Publisher | American Vacuum Society |
|---|
| Place | New York, New York |
|---|
| Terms of use | - You may reproduce (print, make photocopies, or download) the accepted manuscript without permission for non-commercial purposes (research, education, and private study), on the condition that you provide proper attribution of the source in all copies.
- Vous pouvez reproduire (imprimer, faire des photocopies ou télécharger) le manuscrit accepté sans autorisation à des fins non commerciales (recherche, éducation et études privées), à condition de fournir la source appropriée dans toutes les copies.
|
|---|
| Access condition | |
|---|
| In | |
|---|
| Language | English |
|---|
| Peer reviewed | Yes |
|---|
| NRC number | NRCC 51701 |
|---|
| NPARC number | 9077484 |
|---|
| Export citation | Export as RIS |
|---|
| Report a correction | Report a correction (opens in a new tab) |
|---|
| Record identifier | fd5cae99-4739-4f31-9d02-bc856fbaeabe |
|---|
| Record created | 2009-10-03 |
|---|
| Record modified | 2020-12-14 |
|---|
