| Author | Search for: Lockwood, David1; Search for: Grom, G.; Search for: Fauchet, P.; Search for: Tsybeskov, L.; Search for: McCaffrey, John2; Search for: Baribeau, J-M |
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| Affiliation | - National Research Council Canada. NRC Institute for Microstructural Sciences
- National Research Council Canada. NRC Institute for National Measurement Standards
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| Format | Text, Article |
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| Conference | Materials Research Society Symposium on Structure and Properties of Ultrathin Dielectric Films on Silicon and Related Structures |
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| NPARC number | 12346337 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | fd2890c2-9ab5-4353-90eb-d5aa7d5dd9b8 |
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| Record created | 2009-09-17 |
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| Record modified | 2020-04-16 |
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