A new approach to imaging systems incorporating chemical amplification: Synthesis and preliminary evaluation of novel resists based on tertiary copolycarbonates
A new approach to imaging systems incorporating chemical amplification: Synthesis and preliminary evaluation of novel resists based on tertiary copolycarbonates
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| Format | Text, Article |
| Publication date | 1986 |
| In | |
| Language | English |
| NRC number | FRCHET1986A |
| NPARC number | 9365403 |
| Export citation | Export as RIS |
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| Record identifier | fc0d2549-ac90-4d26-84f1-df172f7481d8 |
| Record created | 2009-07-10 |
| Record modified | 2020-03-17 |
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