High efficiency blazed fiber-chip grating coupler with interleaved trenches

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1117/12.2178620
AuthorSearch for: ; Search for: ; Search for: 1ORCID identifier: https://orcid.org/0000-0003-4232-9130; Search for: 1; Search for: ; Search for: ; Search for: ; Search for: 1; Search for: 1; Search for: ; Search for:
Name affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
ConferenceSPIE Optics + Optoelectronics, April 13-15, 2015, Prague, Czech Republic
Subjectintegrated optics; coupling efficiency; DUV lithography; grating couplers; high-efficiency; silicon photonics; silicon thickness; SOI; SOI substrates; silicon wafers
Publication date
Peer reviewedYes
NPARC number21276909
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Record identifierf34ba844-acd5-420b-afc9-df2bab8fd554
Record created2015-11-10
Record modified2020-04-22
Date modified: