High efficiency blazed fiber-chip grating coupler with interleaved trenches

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1117/12.2178620
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Name affiliation
  1. National Research Council Canada. NRC Institute for Microstructural Sciences
FormatText
TypeArticle
Proceedings titleProceedings of SPIE: The International Society for Optical Engineering
ConferenceIntegrated Optics: Physics and Simulations II, 13 April 2015 through 15 April 2015
ISSN0277-786X
ISBN9781628416374
Volume9516
Article number95160J
SubjectIntegrated optics; Coupling efficiency; DUV lithography; Grating couplers; High-efficiency; Silicon photonics; Silicon thickness; SOI; SOI substrates; Silicon wafers
Abstract
Publication date
LanguageEnglish
Peer reviewedYes
NPARC number21276909
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Record identifierf34ba844-acd5-420b-afc9-df2bab8fd554
Record created2015-11-10
Record modified2016-05-09
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