Large Area 50 nm Period Grating by Multiple Nanoimprint Lithography and Spatial Frequency Doubling

From National Research Council Canada

Download
  1. (PDF, 697 KiB)
DOIResolve DOI: https://doi.org/10.1063/1.2390652
AuthorSearch for: ; Search for: ; Search for: ; Search for:
FormatText, Article
Publication date
In
LanguageEnglish
Peer reviewedYes
NRC numberNRCC 53659
NPARC number12744732
Export citationExport as RIS
Report a correctionReport a correction (opens in a new tab)
Record identifierf1101659-6367-4ee6-ae6f-4100fbc55b7e
Record created2009-10-27
Record modified2020-05-10
Date modified: