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Synthesis of tantalum pentoxide films by pulsed laser deposition: material characterization and scale-up

DOIResolve DOI: https://doi.org/10.1016/S0040-6090(99)00703-8
AuthorSearch for: ; Search for: 1; Search for: 2; Search for: ; Search for: 1
Affiliation
  1. National Research Council Canada. NRC Institute for Microstructural Sciences
  2. National Research Council Canada. NRC Institute for National Measurement Standards
FormatText, Article
Publication date
In
  • Thin Solid Films 358, no. 1-2 (2000): 104–113.
NPARC number12744342
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Record identifiereb54c30b-ec07-4554-8de8-b79a0201a174
Record created2009-10-27
Record modified2020-03-26

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