| DOI | Resolve DOI: https://doi.org/10.1109/PN58661.2023.10222958 |
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| Author | Search for: Warren Kut King Kan1; Search for: Sara Toxqui-Rodriguez2; Search for: David Medina-Quiroz2; Search for: Paula Nuño-Ruano2; Search for: Daniele Melati2; Search for: Eric Cassan2; Search for: Delphine Marris-Morini2; Search for: Laurent Vivien2; Search for: Pavel Cheben3; Search for: Laeticia Adelmini1; Search for: Daivid Fowler1; Search for: Carlos Alonso-Ramos2 |
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| Affiliation | - LETI, Université Grenoble Alpes et CEA
- Université Paris-Saclay, Centre de Nanosciences et de Nanotechnologies
- National Research Council Canada. Advanced Electronics and Photonics
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| Format | Text, Article |
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| Conference | 2023 Photonics North (PN), June 12-15, 2023, Montreal, Quebec, Canada |
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| Subject | immersion lithography; silicon photonics; subwavelength grating nanostructures; ultra-broadband MMI; ultra-wideband (UWB); fabrication; excess loss; multi-mode interference; multi-mode interference coupler; power imbalance; sub-wave length grating; ultra-broadhand multimode interference; nanostructures |
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| Abstract | We demonstrate an ultra-broadband 2x2 multimode interference (MMI) coupler leveraging subwavelength grating (SWG) nanostructures fabricated by immersion lithography. Excess loss of ‹2 dB, power imbalance ‹1.5 dB and phase error ‹5° have been measured for a wavelength range of 1300 - 1680 nm. The small feature sizes, down to 75 nm, were well-defined using immersion lithography and optimized optical proximity correction. © 2023 IEEE. |
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| Publication date | 2023-06-12 |
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| Publisher | IEEE |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | e2312840-0ee4-4e12-8741-85ef4ddb64e0 |
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| Record created | 2024-07-10 |
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| Record modified | 2024-07-17 |
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