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Characterization of (100)InP after surface passivation as studied by AFM, XPS and SIMS

From National Research Council Canada

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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
ConferenceECS/ESSDERC Symposium on Analytical Techniques for Semiconductor Materials and Process Characterization II, 1995
Publication date
In
  • ECS/ESSDERC Symposium on Analytical Techniques for Semiconductor Materials and Process Characterization II; Electrochemical Society 95, no. 30 (1995): 253–.
LanguageEnglish
NPARC number12338196
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Record identifierdeaec3ed-0594-40eb-93cb-b342046687c1
Record created2009-09-10
Record modified2020-04-29
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