Integrated design and manufacture of thin film multilayer filters using an automated deposition system

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  1. National Research Council Canada. NRC Institute for Microstructural Sciences
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LanguageEnglish
Peer reviewedYes
NPARC number12327911
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Record identifierde9df6bb-d49e-4003-ab0e-0e4bf41dd88b
Record created2009-09-10
Record modified2020-03-20
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