Design and simulation of a scaled-up continuous deformable mirror system driven by MEMS-based Lorentz actuator arrays

From National Research Council Canada

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Author	Search for: Park, Byoungyoul¹; Search for: Bergren, Adam John¹; Search for: Belov, Miroslav¹; Search for: Burley, Greg²; Search for: Shafai, Cyrus
Affiliation	National Research Council Canada. Nanotechnology National Research Council Canada. Herzberg Astronomy and Astrophysics
Format	Text, Abstract
Conference	COMSOL conference 2020 North America, Oct. 7-8, 2020 [Hosted Online]
Physical description	2 p.
Abstract	This paper presents the design and simulation results of a MEMS-actuated deformable mirror (DM) consisting of a 20 × 20 Lorentz-force actuator array bonded to a flexible mirror. The DM is the critical component of an Adaptive Optics (AO) system targeted for ground-based telescope applications to actively compensate for optical aberrations due to atmospheric turbulence. In addition, there are several other applications for such AO systems, including microscopy, medical imaging, and optical communication. In order to meet the needs of various applications, Finite Element Method simulation of actuator performance is carried out using COMSOL Multiphysics software.
Publication date	2020-10-08
Publisher	The Conference
Language	English
Peer reviewed	Yes
NRC number	NRC-NANO-096
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Record identifier	dd121e8a-6a7d-45c7-ab06-d5f7f0e434bf
Record created	2021-02-22
Record modified	2021-02-22

Date modified:: 2026-01-16