Design and simulation of a scaled-up continuous deformable mirror system driven by MEMS-based Lorentz actuator arrays

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Name affiliation
  1. National Research Council of Canada. Nanotechnology
  2. National Research Council of Canada. Herzberg Astronomy and Astrophysics
FormatText, Abstract
ConferenceCOMSOL conference 2020 North America, Oct. 7-8, 2020 [Hosted Online]
Physical description2 p.
Abstract
This paper presents the design and simulation results of a MEMS-actuated deformable mirror (DM) consisting of a 20 × 20 Lorentz-force actuator array bonded to a flexible mirror. The DM is the critical component of an Adaptive Optics (AO) system targeted for ground-based telescope applications to actively compensate for optical aberrations due to atmospheric turbulence. In addition, there are several other applications for such AO systems, including microscopy, medical imaging, and optical communication. In order to meet the needs of various applications, Finite Element Method simulation of actuator performance is carried out using COMSOL Multiphysics software.
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PublisherThe Conference
LanguageEnglish
Peer reviewedYes
NRC numberNRC-NANO-096
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Record identifierdd121e8a-6a7d-45c7-ab06-d5f7f0e434bf
Record created2021-02-22
Record modified2021-02-22
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