Thermal stability of platinum silicide insub-micron lines
Thermal stability of platinum silicide insub-micron lines
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| Format | Text, Article |
| Conference | 1995 MRS Fall Meeting, Symposium on Materials reliability issues in microelectronics V, San Francisco, California, USA, April 17-21, 1995 |
| Date published | 1995 |
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| Language | English |
| NPARC number | 12338466 |
| Export citation | Export as RIS |
| Report a correction | Report a correction (opens in a new tab) |
| Record identifier | d55688eb-7fbc-4fbe-9d5d-b5dea48d63e4 |
| Record created | 2009-09-10 |
| Record modified | 2020-04-29 |
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