| Author | Search for: Ma, Penghui1; Search for: Verly, Pierre1; Search for: Dobrowolski, J.; Search for: Lin, Fengchen1 |
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| Affiliation | - National Research Council of Canada. NRC Institute for Microstructural Sciences
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| Format | Text, Article |
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| Conference | The 46th Annual Technical Conference |
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| Publication date | 2003 |
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| Publisher | Society of Vacuum Coaters |
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| In | |
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| NPARC number | 12346727 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | d3188d75-f2c1-4ee1-9647-63f233861fd9 |
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| Record created | 2009-09-17 |
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| Record modified | 2021-01-11 |
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