Tailoring the microstructure and surface morphology of metal thin films for nano-electro-mechanical systems applications
Tailoring the microstructure and surface morphology of metal thin films for nano-electro-mechanical systems applications
| Format | Text, Article |
|---|---|
| Publication date | 2008 |
| In | |
| Peer reviewed | Yes |
| NRC number | 471 |
| NPARC number | 8926526 |
| Export citation | Export as RIS |
| Report a correction | Report a correction (opens in a new tab) |
| Record identifier | d232f6ad-fd96-4b2f-a577-45572f37e740 |
| Record created | 2009-04-23 |
| Record modified | 2020-04-15 |
- Date modified: