An amorphous-to-crystalline phase transition within thin silicon films grown by ultra-high-vacuum evaporation and its impact on the optical response

From National Research Council Canada

DOIResolve DOI:
AuthorSearch for: ; Search for: 1; Search for: 1; Search for: ; Search for: 1; Search for: 1; Search for:
  1. National Research Council of Canada. Measurement Science and Standards
FormatText, Article
SubjectAbsorption spectroscopy; Amorphous films; Crystalline materials; Electromagnetic wave absorption; Evaporation; Growth temperature; Light absorption; Metallic films; Optical films; Quartz; Silicon; Substrates; Ultrahigh vacuum; Vacuum evaporation; Volume fraction; X ray diffraction; Crystalline phase transition; Crystalline silicon substrates; Crystalline volume fraction; Decomposition process; Grazing incidence X-ray diffraction; Optical absorption coefficients; Spectral dependences; Wave-vector conservation
Publication date
Peer reviewedYes
NPARC number21277448
Export citationExport as RIS
Report a correctionReport a correction (opens in a new tab)
Record identifiercf1e149d-8dcb-4b3d-966e-26c6ea98a89f
Record created2016-03-09
Record modified2020-03-16
Date modified: