An amorphous-to-crystalline phase transition within thin silicon films grown by ultra-high-vacuum evaporation and its impact on the optical response

From National Research Council Canada

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  1. National Research Council of Canada. Measurement Science and Standards
FormatText, Article
SubjectAbsorption spectroscopy; Amorphous films; Crystalline materials; Electromagnetic wave absorption; Evaporation; Growth temperature; Light absorption; Metallic films; Optical films; Quartz; Silicon; Substrates; Ultrahigh vacuum; Vacuum evaporation; Volume fraction; X ray diffraction; Crystalline phase transition; Crystalline silicon substrates; Crystalline volume fraction; Decomposition process; Grazing incidence X-ray diffraction; Optical absorption coefficients; Spectral dependences; Wave-vector conservation
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Peer reviewedYes
NPARC number21277448
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Record created2016-03-09
Record modified2020-03-16
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