Structure of Hafnium silicate films formed by atomic layer deposition

From National Research Council Canada

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  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
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NPARC number21276871
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Record identifiercb2f666e-e529-4ec1-91b3-b0a0c3877302
Record created2015-10-27
Record modified2020-04-16
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