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Black layer coatings for the photolithographic manufacture of diffraction gratings

From National Research Council Canada

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Affiliation
  1. National Research Council Canada. NRC Institute for Microstructural Sciences
FormatText, Article
ConferenceEighth Optical Society of America Topical Meeting on Optical Interference Coatings, Banff, Alberta, Canada, 15-20 July 2001
Abstract
A black layer coating for an Al/photoresist interface is described with a reflectance less than 0.1% for 413 nm s-polarized light incident at 25º. It is made of space-compatible materials and its RMS roughness is less than 15Å.
Publication date
In
  • Optical Interference Coatings: postconference digest (2001).
Series
  • OSA trends in optics and photonics 63.
LanguageEnglish
NPARC number12346334
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Record identifiercaf23a6e-abfd-4c75-b725-aac4a726bdcc
Record created2009-09-17
Record modified2020-03-27
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