| Abstract | In this paper, the design and analysis of a low voltage large stroke (over 10 µm) MEMS Lorentz deformable mirror, which uses a rigid crossbar, serpentine spring, and thin membrane mirror, is presented. The rigid crossbar and flexible serpentine spring structure minimize the driving current and voltage by maximizing the generated Lorentz force. Designed actuators constitute hundreds or thousands of arrays, depending on the application, and are bonded to a thin-film mirror. The mirror surface can be transformed into various shapes by the Lorentz force generated on each actuator node, which can be used to compensate for distorted wavefronts caused by atmospheric turbulence in ground-based telescope applications. The proposed structure is modelled and studied using COMSOL Multiphysics software. |
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