Simulation of a scaled-up deformable mirror system driven by MEMS-based Lorentz actuator arrays

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Name affiliation
  1. National Research Council of Canada. Nanotechnology
  2. National Research Council of Canada. Herzberg Astronomy and Astrophysics
FormatText, Article
Proceedings titleProceedings of the 2020 COSMOL Conference
ConferenceCOSMOL 2020, Oct. 7-8, 2020 [Hosted Online]
Physical description5 p.
SubjectMEMS; adaptive optics (AO); deformable mirror (DM); Lorentz actuator
Abstract
In this paper, the design and analysis of a low voltage large stroke (over 10 µm) MEMS Lorentz deformable mirror, which uses a rigid crossbar, serpentine spring, and thin membrane mirror, is presented. The rigid crossbar and flexible serpentine spring structure minimize the driving current and voltage by maximizing the generated Lorentz force. Designed actuators constitute hundreds or thousands of arrays, depending on the application, and are bonded to a thin-film mirror. The mirror surface can be transformed into various shapes by the Lorentz force generated on each actuator node, which can be used to compensate for distorted wavefronts caused by atmospheric turbulence in ground-based telescope applications. The proposed structure is modelled and studied using COMSOL Multiphysics software.
Publication date
PublisherThe Conference
LanguageEnglish
Peer reviewedYes
NRC numberNRC-NANO-75
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Record identifierbe881029-210a-412c-8a90-14dd88a22412
Record created2021-02-16
Record modified2021-02-16
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