ELNES and EDS Maing in HfOxNy Thin Films and AlN/TiN Superlattices
ELNES and EDS Maing in HfOxNy Thin Films and AlN/TiN Superlattices
| Author | Search for: ; Search for: ; Search for: ; Search for: 1; Search for: ; Search for: |
|---|---|
| Affiliation |
|
| Format | Text, Article |
| Conference | Microscopy and Microanalysis 2004, August 1-5, 2004, Savannah, Georgia, USA |
| NPARC number | 12346697 |
| Export citation | Export as RIS |
| Report a correction | Report a correction (opens in a new tab) |
| Record identifier | bce7c3df-8385-4364-ab87-bfe79e8a7127 |
| Record created | 2009-09-17 |
| Record modified | 2020-04-16 |
Page details
From:
- Date modified: