| Download | - View accepted manuscript: High-energy electron scattering in thick samples evaluated by bright-field transmission electron microscopy, energy-filtering transmission electron microscopy, and electron tomography (PDF, 8.7 MiB)
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| DOI | Resolve DOI: https://doi.org/10.1017/S1431927622000472 |
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| Author | Search for: Hayashida, Misa1ORCID identifier: https://orcid.org/0000-0003-3154-4636; Search for: Malac, Marek1 |
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| Affiliation | - National Research Council of Canada. Nanotechnology
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| Format | Text, Article |
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| Subject | Beer–Lambert law; bright-field TEM; electron energy-loss spectroscopy (EELS); energy-filtering TEM; multiple scattering; thick sample; thickness measurement; transmission electron microscopy (TEM) |
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| Abstract | Energy-filtering transmission electron microscopy (TEM) and bright-field TEM can be used to extract local sample thickness t and to generate two-dimensional sample thickness maps. Electron tomography can be used to accurately verify the local t. The relations of log-ratio of zero-loss filtered energy-filtering TEM beam intensity (Izₗₚ) and unfiltered beam intensity (Iᵤ) versus sample thickness t were measured for five values of collection angle in a microscope equipped with an energy filter. Furthermore, log-ratio of the incident (primary) beam intensity (Iₚ) and the transmitted beam Iₜᵣ versus t in bright-field TEM was measured utilizing a camera before the energy filter. The measurements were performed on a multilayer sample containing eight materials and thickness t up to 800 nm. Local thickness t was verified by electron tomography. The following results are reported:
• The maximum thickness tₘₐₓ yielding a linear relation of log-ratio, ln (Iᵤ/Izₗₚ) and ln (Iₚ/Iₜᵣ), versus t.
• Inelastic mean free path (⋋ᵢₙ) for five values of collection angle.
• Total mean free path (⋋ₜₒₜₐₗ) of electrons excluded by an angle-limiting aperture.
• ⋋ᵢₙ and ⋋ₜₒₜₐₗ are evaluated for the eight materials with atomic number from ≈10 to 79.
The results can be utilized as a guide for upper limit of t evaluation in energy-filtering TEM and bright-field TEM and for optimizing electron tomography experiments. |
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| Publication date | 2022-03-28 |
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| Publisher | Cambridge University Press |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| NRC number | NRC-NANO-200 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | ba284e9c-1354-47d8-bbc5-9bd40bd4c7ed |
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| Record created | 2022-05-02 |
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| Record modified | 2022-10-19 |
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