High-directionality L-shaped fiber-chip grating couplers realized in 300-mm silicon-on-insulator platform with deep-ultraviolet lithography

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1117/12.2290584
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Affiliation
  1. National Research Council of Canada. Advanced Electronics and Photonics
FormatText, Address
ConferenceIntegrated Optics: Devices, Materials, and Technologies XXII, Jan. 27 - Feb. 1, 2018, San Francisco, United States
Abstract
Publication date
PublisherSociety of Photo-Optical Instrumentation Engineers (SPIE)
In
Series
LanguageEnglish
Peer reviewedYes
NPARC number23002887
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Record identifierb83f3288-5899-4a8f-9d66-0ee1aeb93f04
Record created2018-03-20
Record modified2021-04-23
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