High-directionality L-shaped fiber-chip grating couplers realized in 300-mm silicon-on-insulator platform with deep-ultraviolet lithography (conference presentation)
High-directionality L-shaped fiber-chip grating couplers realized in 300-mm silicon-on-insulator platform with deep-ultraviolet lithography (conference presentation)
DOI | Resolve DOI: https://doi.org/10.1117/12.2290584 |
---|---|
Author | Search for: Alonso-Ramos, Carlos A.; Search for: Benedikovich, Daniel; Search for: Pérez-Galacho, Diego; Search for: Guerber, Sylvain; Search for: Vakarin, Vladyslav; Search for: Marcaud, Guillaume; Search for: Le Roux, Xavier; Search for: Cassan, Eric; Search for: Marris-Morini, Delphine; Search for: Cheben, Pavel1ORCID identifier: https://orcid.org/0000-0003-4232-9130; Search for: Boeuf, Frédéric; Search for: Baudot, Charles; Search for: Vivien, Laurent |
Editor | Search for: García-Blanco, Sonia M.; Search for: Cheben, Pavel1ORCID identifier: https://orcid.org/0000-0003-4232-9130 |
Name affiliation |
|
Format | Text, Address |
Proceedings title | Integrated Optics: Devices, Materials, and Technologies XXII |
Series title | Proceedings of SPIE; no. 10535 |
Conference | Integrated Optics: Devices, Materials, and Technologies XXII, Jan. 27 - Feb. 1, 2018, San Francisco, United States |
ISSN | 0277-786X 1996-756X |
ISBN | 9781510615557 9781510615564 |
Abstract | |
Publication date | 2018-03-14 |
Publisher | SPIE |
Language | English |
Peer reviewed | Yes |
NPARC number | 23002887 |
Export citation | Export as RIS |
Report a correction | Report a correction | Record identifier | b83f3288-5899-4a8f-9d66-0ee1aeb93f04 |
Record created | 2018-03-20 |
Record modified | 2020-03-03 |