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Deposition and Characterization of LaS Lanthanum Monosulfide Thin Films Grown by Pulsed Laser Ablation

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1109/IVNC.2005.1619571
AuthorSearch for: 1; Search for: ; Search for: 2; Search for: ; Search for: ; Search for: ; Search for:
EditorSearch for: Wilshaw, P.; Search for: Hug, S.
Affiliation
  1. National Research Council Canada. NRC Institute for Microstructural Sciences
  2. National Research Council Canada. NRC Institute for Nutrisciences and Health
FormatText, Article
Conference18th International Vacuum Nanoelectronics Conference, 2005
Abstract
This work focuses on improving the crystalline property of the LaS thin films by improving the deposition conditions. Many factors can affect the quality of laser deposited films, including vacuum level, laser energy, laser repetition rate, substrate temperature, target to substrate distance, background gas pressure, and substrate bias.
In
  • Technical Digest of the 18th International Vacuum Nanoelectronics Conference: 233–234.
IdentifierIEEE Cat 05TH8837
NPARC number12346237
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Record identifierb7010cfa-73bf-4a37-a762-b360c2b3398a
Record created2009-09-17
Record modified2020-04-16
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