| DOI | Resolve DOI: https://doi.org/10.1117/12.657463 |
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| Author | Search for: Macintosh, Bruce; Search for: Graham, James; Search for: Oppenheimer, Ben; Search for: Poyneer, Lisa; Search for: Sivaramakrishnan, Anand; Search for: Véran, Jean-Pierre1 |
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| Editor | Search for: Olivier, Scot S.; Search for: Tadigadapa, Srinivas A.; Search for: Henning, Albert K. |
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| Affiliation | - National Research Council Canada. NRC Herzberg Institute of Astrophysics
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| Format | Text, Article |
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| Conference | MOEMS-MEMS 2006 Micro and Nanofabrication, January 21-27, 2006, San Jose, California, United States |
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| Publication date | 2006 |
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| Publisher | SPIE |
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| In | |
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| Series | |
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| Language | English |
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| Peer reviewed | Yes |
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| NPARC number | 13053561 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | b3d2a013-bd82-4da7-90bd-47b42608e181 |
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| Record created | 2009-11-25 |
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| Record modified | 2020-04-22 |
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