Integrated antennas on SI with over 100 GHz performance, fabricated using an optimized proton implantation process

DOI	Resolve DOI: https://doi.org/10.1109/LMWC.2003.817146
Author	Search for: Chan, K. T.; Search for: Chin, A.; Search for: Lin, Y. D.; Search for: Chang, C. Y.; Search for: Zhu, C. X.; Search for: Li, M. F.; Search for: Kwong, D. L.; Search for: McAlister, Sean¹; Search for: Duh, D. S.; Search for: Lin, W. J.
Affiliation	National Research Council Canada. NRC Institute for Microstructural Sciences
Format	Text, Article
Publication date	2003
In	IEEE Microwave and Wireless Components Letters 13, no. 11 (2003): 487–489.
NPARC number	12744627
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Record identifier	b2f0923f-f242-4d64-a719-7b17873e7dae
Record created	2009-10-27
Record modified	2020-04-02