| Abstract | This study presents a comprehensive multi-objective optimization framework specifically designed for micro-electromechanical systems (MEMS). The framework integrates both traditional and adaptive optimization techniques, named Surrogate-Assisted Multi-Objective Optimization (SAMOO) and Adaptive-SAMOO (A-SAMOO), respectively. By addressing key limitations of traditional approaches, such as the consideration of objective constraints and the provision of multiple design options, the proposed framework enhances both flexibility and practical applicability. Results show that adaptive optimization outperforms traditional offline methods by delivering a greater number and higher quality of optimal solutions while requiring fewer finite element method simulations. The adaptive approach showed a significant advantage by attaining high-quality solutions while requiring only 2.8% of the finite element method (FEM) evaluations compared to traditional methods that do not incorporate surrogate models. This performance boost highlights the advantages of online learning in enhancing the accuracy, speed, and diversity of solutions in MEMS optimization. These optimization schemes were tested on multiple MEMS devices with varying physics and complexities, specifically the U-shaped Lorentz force actuator, serpentine Lorentz force actuator, and thermal actuator. The results highlight the robustness and versatility of the proposed methods, particularly in addressing cases involving discrete design variables and strict objective constraints. This comprehensive, step-by-step framework serves as a valuable resource for researchers and practitioners aiming to optimize MEMS designs from the ground up, providing a reliable and effective approach to multi-objective optimization in MEMS applications. |
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