Control of low inertia galvanometers for high precision laser scanning systems

From National Research Council Canada

DOIResolve DOI: http://doi.org/10.1117/12.7976653
AuthorSearch for: 1 
Name affiliation
  1. National Research Council Canada. NRC Institute for Information Technology
TypeArticle
Journal titleOptical Engineering
ISSN0091-3286
1560-2303
Volume27
Issue2
Pages104–110
Abstract
A high precision controller used to accurately drive low inertia galvanometer scanners is presented. Drift errors introduced by the galvanometer position sensor and its electronic driving circuit are compensated using two synchronization photodiodes or phototransistors. The effect of the temperature is analyzed, and comparisons are made with the conventional method of using an analog-to-digital converter to read the signal directly from the position sensor. Absolute accuracy of 10-5 is measured for a change of 10°C. This accuracy is limited to 10-2 when the galvanometer position sensor is used directly. Nonlinearity variations are negligible.
Publication date
PublisherSociety of Photo-optical Instrumentation Engineers
NoteMr. François Blais was affiliated with the National Research Council Canada, Division of Electrical Engineering when he authored this artilce.
LanguageEnglish
Peer reviewedYes
NRC numberNRCC 28513
NPARC number8913586
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Record created2009-04-22
Record modified2018-10-04
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