Control of low inertia galvanometers for high precision laser scanning systems

DOI	Resolve DOI: https://doi.org/10.1117/12.7976653
Author	Search for: Blais, François¹
Name affiliation	National Research Council of Canada. NRC Institute for Information Technology
Format	Text, Article
Journal title	Optical Engineering
ISSN	0091-3286 1560-2303
Volume	27
Issue	2
Pages	104–110
Abstract	A high precision controller used to accurately drive low inertia galvanometer scanners is presented. Drift errors introduced by the galvanometer position sensor and its electronic driving circuit are compensated using two synchronization photodiodes or phototransistors. The effect of the temperature is analyzed, and comparisons are made with the conventional method of using an analog-to-digital converter to read the signal directly from the position sensor. Absolute accuracy of 10-5 is measured for a change of 10°C. This accuracy is limited to 10-2 when the galvanometer position sensor is used directly. Nonlinearity variations are negligible.
Publication date	1988-02-01
Publisher	Society of Photo-optical Instrumentation Engineers
Note	Mr. François Blais was affiliated with the National Research Council Canada, Division of Electrical Engineering when he authored this artilce.
Language	English
Peer reviewed	Yes
NRC number	NRCC 28513
NPARC number	8913586
Export citation	Export as RIS
Report a correction	Report a correction
Record identifier	b1e3a85b-e1a9-4aa7-8014-915d17ad9e8f
Record created	2009-04-22
Record modified	2020-03-17