| DOI | Resolve DOI: https://doi.org/10.1109/Group4.2015.7305897 |
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| Author | Search for: Penades, Jordi Soler; Search for: Nedeljkovic, Milos; Search for: Khokhar, Ali Z.; Search for: Mashanovich, Goran Z.; Search for: Ortega-Monux, Alejandro; Search for: Wanguermert-Perez, Gonzalo; Search for: Halir, Robert; Search for: Molina-Fernandez, Inigo; Search for: Cheben, Pavel1ORCID identifier: https://orcid.org/0000-0003-4232-9130 |
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| Affiliation | - National Research Council of Canada. Information and Communication Technologies
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| Format | Text, Article |
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| Conference | 12th IEEE International Conference on Group IV Photonics, GFP 2015, 26 August 2015 through 28 August 2015 |
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| Subject | diffraction gratings; electric losses; hydrofluoric acid; photonics; silicon on insulator technology; waveguides; buried oxide layers; extinction ratios; Machzehnder interferometers (MZI); mid-infrared devices; mid-infrared wavelengths; multimode interference couplers; subwavelength grating; suspended structure; infrared devices |
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| Abstract | Suspended structures enable low loss propagation in silicon waveguides for mid-infrared wavelengths by removing the lossy buried oxide (BOX) layer. We previously demonstrated suspended waveguides with a silicon core and a sub-wavelength grating (SWG) lateral cladding, which allows access to the buried oxide layer for under-etching with hydrofluoric acid. Here we show that bends, multimode interference couplers (MMI) and Mach-Zehnder interferometers (MZI) can be successfully implemented in this platform. Specifically, we report waveguides with propagation losses of 1.2 dB/cm, 90° bends with 0.03 dB/bend loss, compact MMI couplers with imbalances of 0.5 dB, and MZI structures with extinction ratios in excess of 24 dB. |
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| Publication date | 2015-08 |
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| Publisher | IEEE |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| NPARC number | 21277420 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | b1d5b348-e75a-4c51-8b83-1312dfc5e015 |
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| Record created | 2016-03-09 |
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| Record modified | 2020-04-22 |
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