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A measurement of young’s modulus and residual stress in MEMS bridges using a surface profiler

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1088/0960-1317/13/5/321
AuthorSearch for: 1
Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
Publication date
In
  • Journal of Micromechanics and Microengineering 13, no. 5 (2003): 686–692.
NPARC number12744629
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Record identifieracec03b3-c346-45c3-89cb-5f9d766244c8
Record created2009-10-27
Record modified2020-04-02
Date modified: